MODEL CN VACUUM OVEN

• Operating Continuous Temperature Range: 100-500°F (30-260°C)
• Operating Vacuum Range:  760 to 1.0 x 10^-6 Torr
• Control Accuracy: +/- 2°C or 1% of span whichever is greater
• Rectangular Chamber Type Construction
• Standard Platen Dimensions:
  • Model 36CN-HV – 35.00-in W x  35.00-in D
  • Model 30CN-HV – 29.50-in W x  29.50-in D
  • Model 24CN-HV – 23.50-in W x  23.50-in D
  • Model 18CN-HV – 17.50-in W x  17.50-in D
  • Model 12CN-HV – 11.50-in W x  11.50-in D
• Temperature Uniformity (9-pt survey results) measured at 1-Torr
  • Model 36CN-HV +/- 2.5°C
  • Model 30CN-HV +/- 2.0°C
  • Model 24CN-HV +/- 2.0° C
  • Model 18CN-HV +/- 2.0° C
  • Model 12CN-HV +/- 1.5° C

 The work chamber is constructed of 304L or 316-type stainless steel and features Georgia Oven’s proprietary, high strength gusseting system.  The chamber interior is fully welded and helium leak-checked to meet or exceed a minimum 5.5 x 10^-9 mbar/sec leak back rate.  Chambers are then passivated once all welding has been completed, leaving a clean, impurity- free finish.  Other features include:

• Custom Mineral Insulated or Quartz heaters, providing top, bottom and side chamber wall heat. 
• Multilayer insulation on the rear wall where chamber penetrations, turbo pump and sensor ports are located. 
• A top mounted powered or un-powered draft inducer port aids in process cooling, maintains oven exterior at safe operator temperatures and reduces the amount of thermal loading to the surrounding environment.  (Top mounted draft inducing is recommended for applications over 302°F (150°C).  Unpowered draft inducers should be connected to a negative pressure in-house exhaust system.)
• The vessel door features Georgia Oven’s proprietary ultra-heavy gusseting system, providing anti-deflection capabilities during demanding thermal cycles.   Dual, one-piece, large-diameter Viton door O-rings offer superior heat resistance and sealing.  Sealing between the door and faceplate is further enhanced by pulling a vacuum between the two o-rings, creating a superior clamping force.  Custom, air-cooled chamber doors minimize deflection under extreme temperatures and pressures.
• Vacuum levels are achieved by utilizing both the F4AV control and the vacuum gauge.  Our high vacuum system control is made up of an event-based logic.  The F4AV issues digital output commands, which trigger the roughing valve, backfill valve, the high vacuum pump and its respective valves.  Set-point triggers are sent from the Varian SenTorr to the F4AV via digital input events these include chamber pressure, high vacuum pump backing pressures and high vacuum achievement.  This system is solely developed for the achievement of high vacuum and does not accurately control pressures above 500-mTorr.  However multilevel control systems are available and require PLC and touchscreen integration.  Our high vacuum pumping is typically done with Turbo Molecular type pumps but we are experienced with other systems such as Cryogenic and Diffusion.