MODEL
HT
VACUUM OVEN
-
Operating Continuous Temperature Range: 100-1202° F (30-650°
C)
-
Operating Vacuum Range: 1.0 x 10-2 Torr to1.0 x
10-4 Torr
-
Control Accuracy: +/- 2°C
or 1% of span which ever is greater
-
Rectangular Chamber Type Construction
-
Standard Work Chamber Dimensions:
-
Model 30HT-HV – 30.00-in W x 30.00-in H X 30.00-in D
-
Model 24HT-HV – 24.00-in W x 24.00-in H X 24.00-in D
-
Model 18HT-HV – 18.00-in W x 18.00-in H X 18.00-in D
-
Temperature Uniformity (9-pt survey results) measured at
1-Torr
-
Model 30HT-HV +/- 4.2°C
-
Model 24HT-HV +/- 2.7°
C
-
Model 18HT-HV +/- 1.6°
C
-
Operating Voltages vs. Operating Vacuum Range
-
1.0 x 10-2 Torr 60V
-
1.0 x 10-3 Torr 120V
-
1.0 x 10-4 Torr 240V
The work chamber is constructed of
either 316L or 310 stainless steel (depending on application), which houses the
quartz glass elements. The work chamber is then surrounded by the pressure
vessel – constructed of 304L stainless steel and Georgia Oven Company’s
proprietary high-strength reinforced gusseting system. Other features include:
-
Double O-ring door seals, water cooled
-
Water cooled faceplate
-
Multilayer insulation on the rear wall of the pressure vessel
where chamber penetrations and ports are provided.
-
A top mounted powered or unpowered draft inducer port which
aids in process cooling, maintains oven exterior at safe operator
temperatures and reduces the amount of thermal loading to the surrounding
environment.
-
The vessel door features Georgia Oven’s proprietary
ultra-heavy gusseting system, providing anti-deflection capabilities during
demanding thermal cycles. Vessel doors utilize a multi-layer insulation
system – maximizing efficiency, reducing losses and thermal loading to the
surrounding environment. The vessel door features multi-layer internal heat
shields that produce a thermal drag between the work chamber and the vessel
door, ensuring maximum safe operation and extended processing times.
-
Vacuum levels are achieved by utilizing the F4AV Controller
and the Varian SenTorr high-vacuum gauge. The Model HT-high Vacuum system
control is made up of an event-based logic. The F4AV controller issues
digital output commands, which trigger the roughing valve, backfill valve,
the high vacuum pump and its respective valves. Set-point triggers are sent
from the Varian SenTorr to the F4AV Controller via digital inputs –
including chamber pressure, high vacuum pump backing pressures and high
vacuum achievement. This system is solely developed for high vacuum and
does not accurately control pressures above 500-mTorr. However, multilevel
control systems are available and require PLC and touch-screen integration.
High vacuum pumping is typically done with Turbo Molecular type pumps, but
Georgia Oven Company has expertise in Cryogenic and Diffusion systems as
well.