The work chamber is constructed of either 316L or 310 stainless steel (depending on application), which houses the quartz glass elements. The work chamber is then surrounded by the pressure vessel – constructed of 304L stainless steel and Georgia Oven Company’s proprietary high-strength reinforced gusseting system. Other features include:
Double O-ring door seals, water cooled
Water cooled faceplate
Multilayer insulation on the rear wall of the pressure vessel where chamber penetrations and ports are provided.
A top mounted powered or unpowered draft inducer port which aids in process cooling, maintains oven exterior at safe operator temperatures and reduces the amount of thermal loading to the surrounding environment.
The vessel door features Georgia Oven’s proprietary ultra-heavy gusseting system, providing anti-deflection capabilities during demanding thermal cycles. Vessel doors utilize a multi-layer insulation system – maximizing efficiency, reducing losses and thermal loading to the surrounding environment. The vessel door features multi-lay internal heat shields that produce a thermal drag between the work chamber and the vessel door, ensuring maximum safe operation and extended processing times.
Vacuum levels are achieved using simple single set-point direct acting solenoids, fully programmable from the F4AV Controller. Accuracy is typically +/-2Torr during vacuum and +/-1Torr using a flow and pressure regulated backfill source. A digital absolute vacuum transducer provides accurate and stable pressure level feedback to the F4AV Controller. Typical operating control range is in Torr, 760 to 1.