MODEL ST VACUUM OVEN

• Operating Continuous Temperature Range: 100-572°F (30-300°C)
• Operating Vacuum Range:  760 to 1.0 x 10^-6 Torr or greater
• Control Accuracy: +/- 2°C or 1% of span which ever is greater
• Rectangular Chamber Type Construction
• Standard Work Chamber Dimensions:
  • Model 36ST-HV – 36.00-in W x 36.00-in H X 36.00-in D
  • Model 30ST-HV – 30.00-in W x 30.00-in H X 30.00-in D
  • Model 24ST-HV – 24.00-in W x 24.00-in H X 30.00-in D
  • Model 18ST-HV – 18.00-in W x 18.00-in H X 24.00-in D
  • Model 12ST-HV – 12.00-in W x 12.00-in H x 12.00-in D
• Temperature Uniformity (9-pt survey results) measured at 1-Torr
  • Model 36ST-HV +/- 5.5°C
  • Model 30ST-HV +/- 3.0°C
  • Model 24ST-HV +/- 3.0°C
  • Model 18ST-HV +/- 2.0°C
  • Model 12ST-HV +/- 1.5°C

The work chamber is constructed of 304L stainless steel and features our unique proprietary high strength gusseting system.  The interior of the chamber is fully welded and helium leak checked to meet or exceed a minimum 5.5 x 10^-9 mbar/sec leak back rate.  Chambers are then passivated once all welding has been completed leaving a clean impurity free finish.  Other features include:

• Proprietary constructed Mineral Insulated heaters heat the top, bottom and side chamber walls. 
• Our Multilayer insulation technique is used on the rear wall where chamber penetrations, turbo pump and sensor ports are provided. 
• A top mounted powered or un-powered draft inducer port aids in process cooling, maintains oven exterior at safe operator temperatures and reduces the amount of thermal loading to the surrounding environment.  Top mounted draft inducing is recommended for applications over 302°F (150°C).  Unpowered draft inducers should be connected to a negative pressure in-house exhaust system.

The door features our unique ultra heavy gusseting system, which offers anti deflection capabilities during demanding thermal cycles.   Furthermore our dual one-piece constructed large diameter Viton door O-rings offer superior heat resistance and sealing.  Sealing between the door and faceplate is further enhanced by pulling a vacuum between the two o-rings creating a superior clamping force.  Chamber doors utilize our unique air-cooled construction minimizing deflection under extreme temperatures and pressures.

Vacuum levels are achieved by utilizing both the F4AV control and the Varian XGS or MKS937a high vacuum gauge.  Our high vacuum system control is made up of an event-based logic.  The F4AV issues digital output commands, which trigger the roughing valve, backfill valve, the high vacuum pump and its respective valves.  Set-point triggers are sent from the Varian SenTorr to the F4AV via digital input events these include chamber pressure, high vacuum pump backing pressures and high vacuum achievement.  This system is solely developed for the achievement of high vacuum and does not accurately control pressures above 500-mTorr.  However multilevel control systems are available and require PLC and touchscreen integration.  Our high vacuum pumping is typically done with Turbo Molecular type pumps but we are experienced with other systems such as Cryogenic and Diffusion.